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6 Axis Manipulator MPS Series
SIX(6) AXIS MANIPULATOR MPS (Muliti Purpose Stage) SERIES are most suitable for fine positioning with the element of liquid crystal projector and CCD camera, and most of experimental instrument. Miniaturization, light-weighting, high stiffness, and cost reduction realized at the same time.
Specifications
Axis | Ideal Resolution | Motion Range | Max Speed | Micro-step Function |
X | 0.1µm | ±5mm | 1mm/sec | 1/20 |
Y | 0.1µm | ±5mm | 1mm/sec | 1/20 |
Z | 0.1µm | ±5mm | 10mm/sec | 1/20 |
øx
| 0.00038deg | ±3deg | 3.8deg/sec | 1/2 |
øy | 0.00028deg | ±3deg | 2.8deg/sec | 1/2 |
Øz | 0.0018deg | ±3deg | 18deg/sec | 1/4 |
Dimension
