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Model FKY-22
General Specifications
| Height (Y axis at zero position) | 950 mm |
| Width (X axis) | 1000mm |
| Length (Z axis…Beam direction) | 1500mm |
| Top plate size | 1500mm(Z axis)x1000mm(X axis) |
| Total weight | 2000 kg |
| Load capacity | 100kg |
| Tilt adjustment | ± 1°(Tilt range) |
| Motorized axis | XYZ |
| Motion range | ± 50mm(for XYZ) |
| Resolution | 1μm(for XZ) 0.46μm(for Y) |
| Repeatability | 2μm |
Linear encoders are equipped with all axis.
Top plate is made of material granite and precisely polished to be flatness 15µm. They have a regular rectilinear set of tapped M6 holes on the surface. The spacing between adjacent holes is 50mm and the central hole is located in the middle of the top plates. The plates of other parts are made of iron steel.

