Content
Layer Profiling System VertScan
The VertScan layer profiling system performs layer structural analysis by generating tomographic images of a specified cutting location from optical microscope images that are obtained by moving sequentially in the vertical direction.
- Development and Distribution: Ryoka Systems Inc.
Features
Super depth measurement
A Ryoka Linnik interference objective lens equipped with an
optical path compensation plate insertion mechanism allows
measurement of the layer section under a transparent layer to
a maximum depth 3 mm. This system is very useful for defect
analysis after manufacturing of flat display panels such as
plasma displays.
Very weak interference fringe patterns can be captured
Since our original VSI interference image creation software
enables image creation from very weak interference fringe
patterns that cannot be visually recognized, foreign particle
locations in multilayer film can be identified.
100 magnification interference is achieved
A Ryoka Linnik interference objective lens allows easy
adjustment and observation for 100 magnification interference
figures for which alignment and adjustment have been
difficult.
NSIMAGIK compatible system
NSIMAGIK specifications common to various image
creationsystems and image processing systems are fully
supported. The required NSIMAGIK software can be freely
selected, andfuture expansion of functions is possible.
Specifications of Stage
Item | RSY-150 | RSY-300 |
Compressed Air | Tube : Internal diameter 4mm, External diameter 6mm | |
Power Source | Single-phase 100V 4KVA | |
Clean Room Response | Response to Class 1000 | |
Stage Unit Size | 600 (W) ×500 (D) ×1400 (H) | 1200 (W) ×800 (D) ×1500 (H) |
Stage Unit Weight | About 200kg | About 300kg |
Control Rack Unit Size | 570 (W) ×750 (D) ×1850 (H) | 5700 (W) ×750 (D) ×1850 (H) |
Control Rack Unit Weight | About 180kg | |
X-Y Stage | ||
X Valid Stroke | ±75mm | ±150mm |
Y Valid Stroke | ±75mm | ±150mm |
Maximum Speed | 10mm / sec | |
Actuator | Ball screw, Open-loop control | |
Stage Resolution | 1μm / step | |
Repeatability | ±1μm | |
Z axis | ||
Valid Stroke | ±50mm | |
Actuator | Grand screw, Open-loop control | |
Z Axis Resolution | 1μm / step (Half-step) | |
Jog-Dial | 100μm / Revolution | |
Joy-Stick | Hi-speed setting ： 8000pps, Low-speed setting ： 200pps | |