Content
Slits
Manual KOHZU precision slits use simple design with dovetail slides for blade guidance, and micrometer heads as actuators. Optimized design, precise manufacturing and careful adjustment provide excellent performance for such simple devices. There are several modifications of these slits.
Motorized KOHZU precision slits have design features common to our standard translation stages of the XA series (please refer to the catalogue). Motion of the blades is guided by precision cross roller guides, and driven by a precision ground screw mechanism. A stepping motor is being used as an actuator. These features
provide outstanding performance of our slits, such as good resolution, high repeatability, straightness and small angular errors of blade motion.
Motorized precision slits are being manufactured in various modifications which differ in blade drive (coupled or independent), blade mounting, shape, thickness etc. There is also a modification for use in a vacuum. We can adapt our slits for use with a specific control system, where there are required motors or connectors other than our standard.
| Manual 4-blade slit with upper, lower, left and | |
| Motorized 4-blade slit for general use. Independent blade motions and compact design. | |
| High precision motorized slit.Four linear encoders can be installed in order to monitor independent motion of each blade. | |
|---|---|---|
| Slit with two pairs of blades with mechanically coupled |
Specification summary
| Model | GHM-3S | GHM-3SR | GHM-3SV | GHM-SP | GHM-7 |
| Feature | Independent blades | Overlapping blades | Vacuum option**** | High precision | Coupled blades |
| Blade travel | (0~10)mm | (-5~+5)mm | (0~10)mm | (0~10)mm | (0~10)mm |
| Minimum gap | 10 µm | 0 | 10 µm | 10 µm | 10 µm |
| Resolution* | 0.5µm/step | 0.5µm/step | 0.5µm/step | 0.5µm/step | 0.5µm/step |
| Encoder resolution | ----- | ----- | ----- | 0.1 µm | ----- |
| Repeatability | 0.5 µm | 0.5 µm | 0.5 µm | 0.2 µm | 0.5 µm |
| Absolute accuracy | 10 µm | 10 µm | 10 µm | 5 µm | 10 µm |
| Blade motion straightness | 1 µm | 1 µm | 1 µm | 0.5 µm | 1 µm |
| Blade edge perpendicularity | 0.1º | 0.1º | 0.1º | 0.05 º | 0.1º |
| Blade parallelism | 20" | 20" | 20" | 10" | 20" |
| Blade material** | Tantalum | Tantalum | Tantalum | Tantalum | Tantalum |
| Blade thickness*** | 5 mm, 10 mm | 5 mm | 5 mm | 5 mm | 5 mm |
| Environment | Air | Air | >10-5 mbar | Air | Air |
* - Microstep drive can be used in order to enhance the resolution.
** - Tungsten or Tungsten alloy can be used as well.
*** - Use of blades thicker than 5mm require increased thickness of the slit body.
**** - Whole slit including motors is placed inside vacuum.