Content
XA16F-L21
This stage is new.
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| Price(JPY) : | ￥ 360,000 |
| Quantity : | |
Drawings and CAD files
| 2D as gif | 2D as DXF | 3D as STEP | 3D "edrawings" for downloading | 3D "edrawings" embedded |
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Specification (Mechanical)
| Model Number | XA16F-L21 |
|---|---|
| Mirror Model Number | XA16F-L21-R |
| Table Size | 160mm—160mm |
| Guide Mechanism | Linear Guide |
| Motion Range | ±50mm |
| Lead Mechanism | Ball Screw, Lead5.0mm |
| Ideal Resolution | 5μm/step (Half Step) |
| Maximum Speed | 50mm/sec |
| Accumulated Lead Error | 15μm/150mm |
| Repeatability | ±0.5μm |
| Lost Motion | 5μm |
| Straightness | 4μm/100mm |
| Backlash | 2μm |
| Moment Load Stiffness | 0.2 arcsec/kgf-cm, Roll Direction |
| Load Capacity | 40kg |
| Material | Steel (Table: Aluminum Alloy) |
| Finishing | Matt Black |
| Weight | 11.5kg |
Specification (Electrical)
| Standard Motor | Five (5) phase stepper motor (Oriental Motor) (PK566-B) |
|---|---|
| Standard Connector | P-1620BA, P-1620A-STA (Hirose) |
Options/Accessories
| Vacuum | up to "ultra heigh vacuum" (UHV), contact us. |
|---|---|
| Clean room | -C Lubricant exchange |
| Mirror Symmetry | see technical for possibilities, contact us |
| Motor handle | to manually move the stage |
| Motor type | nearly any motor type can be mounted, contact us. |
| Connector type | exchange to DSub 15 connector, contact us. |
| Limit | different types of optical/mechanical, contact us. |
| Encoder | Linear encoders (up to 50nm), contact us. |
| Adapters | mount stages together. contact us.** |
| Customization | Anything you need? contact us.** |
Measuring report
| Filetype | Filename | Filesize |
|---|---|---|
 (Adobe PDF) |
XA16F Series 01 | 532.7 KB |
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Application Example
