Ultra precision Stages
SPU-1A & C
• 1μm Eccentricity 1• High-Resolution & Repeatability• 1000 Steps / Revolution 5-Phase Stepper Motors• Optional 200 Steps / Revolution 2-Phase Stepper Motors• Mechanical End-of-Travel Limit Sensors• Available in 70mm & 100mm Table Size• Central Bore for Instrumentation Wiring• 1 or 3kg Load Capacity 2