Content
XYθ Stage For Multipurpose Three-Dimensional Measurement
The KZ series is a multipurpose XYθ stage for shape measurement, image observation, and image processing. The system can be configured with an optional SC-200 motor controller, portal frame, and vibration isolation table. Also an XY stage can be selected from two types: stroke 200 mm (KZ-400) and 300 mm (KZ-600).
System Components of | KZ-400 | KZ-600 | |
| Motion Range | 200mm | 300mm |
Maximum Speed | 40mm / sec | ||
Ideal Resolution | 4μm / step (Half-step) | ||
Repeatability | ±2μm | ||
Manual θStage | Motion Range | ±5° | ±3° |
Weight of XYθ Stage | 50kg | 100kg | |
Load Capacity | 15kg | 20kg | |